Material:
TaN
AlN
Al₂O₃
CVD-D
DLC
Predicted Film PropertiesModel confidence: 91%
Process Windowrefresh ↻
DOE Intelligence Assistant
I've analysed your current parameter settings. The primary gas ratio is your highest-leverage variable. Want me to suggest a reduced DOE matrix?
Parameter Space Explorer — TaN
Property map — bubble size = predicted value
Traditional full-factorial vs MatrixDOE points
Full factorial
runs
All parameter combinations
MatrixDOE Bayesian
runs
Sequential adaptive sampling
Saved
runs
≈ €k · weeks
Diagnosis Engine

Diagnose process behavior
from literature evidence.

Identify the phase regime, understand the mechanism, and determine what to change next — using grounded literature data combined with your DOE history.

Describe the process issue
Describe your process issue and I'll identify the likely cause from literature and your DOE history.